Title:
【発明の名称】単結晶製造装置用黒鉛発熱体
Document Type and Number:
Japanese Patent JP2710288
Kind Code:
B2
Inventors:
Yoshihiro Hosokawa
Yoshiki Yabuhara
Yoshiki Yabuhara
Application Number:
JP11903989A
Publication Date:
February 10, 1998
Filing Date:
May 12, 1989
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B15/14; C01B31/04; H01L21/208; (IPC1-7): C30B15/14
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)