Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP2729119
Kind Code:
B2
More Like This:
Inventors:
FUKUZAWA FUMIHARU
Application Number:
JP16487191A
Publication Date:
March 18, 1998
Filing Date:
July 05, 1991
Export Citation:
Assignee:
NIPPON DENKI AISHII MAIKON SHISUTEMU KK
International Classes:
G05F1/10; G05F1/56; G05F3/24; H01L21/822; H01L27/04; (IPC1-7): G05F3/24; G05F1/56; H01L21/822; H01L27/04
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)