Title:
【発明の名称】微小距離移動機構
Document Type and Number:
Japanese Patent JP2744967
Kind Code:
B2
Inventors:
Masashi Shigeno
Wakiyama Shigeru
Wakiyama Shigeru
Application Number:
JP28259687A
Publication Date:
April 28, 1998
Filing Date:
November 09, 1987
Export Citation:
Assignee:
Seiko Instruments Co., Ltd.
International Classes:
H01J37/20; G01N37/00; G01Q10/04; G01Q60/10; G01Q60/16; H01J37/28; (IPC1-7): H01J37/28; G01N37/00
Other References:
【文献】欧州公開239085(EP,A1)