Title:
【発明の名称】拡散炉装置
Document Type and Number:
Japanese Patent JP2746914
Kind Code:
B2
More Like This:
Inventors:
SASAHARA KATSUYUKI
Application Number:
JP12925388A
Publication Date:
May 06, 1998
Filing Date:
May 25, 1988
Export Citation:
Assignee:
KYUSHU NIPPON DENKI KK
International Classes:
H01L21/223; H01L21/31; (IPC1-7): H01L21/31
Domestic Patent References:
| JP5590405A | ||||
| JP61194728A | ||||
| JP62152517A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)