Title:
【発明の名称】信号の位置決め方法
Document Type and Number:
Japanese Patent JP2752500
Kind Code:
B2
Abstract:
A method for locating the signal from a fiducial mark which is separated by a known distance from a second fiducial mark is disclosed. The signals from the fiducial marks are presumed to be corrupted by noise. The method utilizes the known spacing of the fiducial marks to construct a filter function which, when convolved with the corrupted signal, produces an enhanced signal having a peak at the location of the fiducial mark.
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Inventors:
FUREDERITSUKU SUHORON FUIIDERAA
Application Number:
JP11668290A
Publication Date:
May 18, 1998
Filing Date:
May 02, 1990
Export Citation:
Assignee:
HYUURETSUTO PATSUKAADO CO
International Classes:
G01B21/00; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): G01B21/00; G03F9/00; H01L21/027
Domestic Patent References:
| JP264783A | ||||
| JP62254736A | ||||
| JP60142408A | ||||
| JP6015923A | ||||
| JP6015921A |
Attorney, Agent or Firm:
Hideo Ueno