【発明の名称】CVD方法

Title:

【発明の名称】CVD方法

Document Type and Number:

Japanese Patent JP2762367

Kind Code:

B2

Inventors:

KOBAYASHI TSUKASA
SEKIGUCHI ATSUSHI
TAKAGI SHINJI

Application Number:

JP20560589A

Publication Date:

June 04, 1998

Filing Date:

August 10, 1989

Export Citation:

Assignee:

ANERUBA KK

International Classes:

C23C16/44; C23C16/50; C23C16/54; C23C16/56; H01L21/31; H01L21/316; (IPC1-7): C23C16/44; C23C16/56; H01L21/31; H01L21/316

Domestic Patent References:

Attorney, Agent or Firm:

Suzuki Toshiyuki

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