Title:
【発明の名称】配線形成方法
Document Type and Number:
Japanese Patent JP2784797
Kind Code:
B2
Inventors:
ISHIBASHI AKIRA
FUNATO KENJI
MORI YOSHIFUMI
FUNATO KENJI
MORI YOSHIFUMI
Application Number:
JP13808389A
Publication Date:
August 06, 1998
Filing Date:
May 31, 1989
Export Citation:
Assignee:
SONII KK
International Classes:
H01L21/768; H01L21/312; H01L23/522; (IPC1-7): H01L21/768; H01L21/312
Domestic Patent References:
| JP614224A | ||||
| JP6311672A | ||||
| JP2963A |
Attorney, Agent or Firm:
Masatomo Sugiura