Title:
【発明の名称】荷重センサ
Document Type and Number:
Japanese Patent JP2803796
Kind Code:
B2
Inventors:
Utsunomiya Michito
Application Number:
JP4880087A
Publication Date:
September 24, 1998
Filing Date:
March 05, 1987
Export Citation:
Assignee:
ISHIDA CO.,LTD.
International Classes:
H01L29/84; G01L1/18; (IPC1-7): H01L29/84; G01L1/18
Domestic Patent References:
| JPS4831706A | ||||
| JPS6243653A | ||||
| JPS5875873A | ||||
| JPS60206079A |