【発明の名称】薄膜作成方法

Title:

【発明の名称】薄膜作成方法

Document Type and Number:

Japanese Patent JP2835891

Kind Code:

B2

Inventors:

AKETAGAWA KENICHI
SAKAI SUMIO
TATSUMI TOORU

Application Number:

JP26892491A

Publication Date:

December 14, 1998

Filing Date:

September 20, 1991

Export Citation:

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Assignee:

ANERUBA KK
NIPPON DENKI KK

International Classes:

C23C16/44; C23C16/52; C30B25/04; C30B25/14; C30B25/16; C30B25/18; H01L21/205; (IPC1-7): C30B25/14; C30B25/04; C30B25/16; C30B25/18; H01L21/205

Domestic Patent References:

JP1226791A

Attorney, Agent or Firm:

Suzuki Seiji

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