Title:
【発明の名称】プローバのアタッチメントボード
Document Type and Number:
Japanese Patent JP2836101
Kind Code:
B2
Abstract:
PURPOSE:To rapidly judge an inferior place by short-circuiting a signal wire and a ground wire on an attachment board. CONSTITUTION:In such a case that inferiority is generated in the continuity check between an LSI tester and a wafer in the attachment board 1a of a prober, when voltage is applied to a pad 3c, the contact of a relay circuit 2 is closed and a ground terminal (pad 3b) and a signal terminal (pads 3a, 3e, 3g) become a continuity state. Therefore, when a current is allowed to flow to a signal wire and the voltage between the signal wire and a ground wire is measured, it is checked whether the LSI tester and the attachment board 1a are in a continuity state. Then the inferiority between the LSI tester and the attachment board 1a is clearly discriminated from that between the attach ment board 1a and the wafer and the setting of an inferior place can be rapidly performed.
Inventors:
IKEGAMI FUMIO
Application Number:
JP15123189A
Publication Date:
December 14, 1998
Filing Date:
June 14, 1989
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G01R31/02; G01R1/073; G01R31/28; H01L21/66; (IPC1-7): G01R31/28; G01R1/073; H01L21/66
Attorney, Agent or Firm:
Sugano Naka