Title:
【発明の名称】プラズマガウジング装置
Document Type and Number:
Japanese Patent JP2839760
Kind Code:
B2
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Inventors:
HOSHINO TADASHI
FUJAMA HIROHISA
SONODA HIROFUMI
INAMURA AKIO
FUJAMA HIROHISA
SONODA HIROFUMI
INAMURA AKIO
Application Number:
JP19530791A
Publication Date:
December 16, 1998
Filing Date:
August 05, 1991
Export Citation:
Assignee:
NITSUTETSU YOSETSU KOGYO KK
International Classes:
B23K10/00; (IPC1-7): B23K10/00; B23K10/00
Domestic Patent References:
JP60244469A | ||||
JP5881564A | ||||
JP56109165A |
Attorney, Agent or Firm:
Nobuoki Sugi