Title:
【発明の名称】荷電粒子ビーム軌道の計測および調整方法、ならびにその計測装置
Document Type and Number:
Japanese Patent JP2839842
Kind Code:
B2
Inventors:
NISHIMURA EIICHI
SAKAI TAKURO
TOMIMASU TAKIO
SAKAI TAKURO
TOMIMASU TAKIO
Application Number:
JP23157694A
Publication Date:
December 16, 1998
Filing Date:
September 27, 1994
Export Citation:
Assignee:
JU DENSHI REEZA KENKYUSHO KK
International Classes:
H05H7/00; G01T1/29; H01S3/30; H05H13/04; (IPC1-7): H05H13/04
Domestic Patent References:
| JP5182793A | ||||
| JP5100040A | ||||
| JP4101400A |
Attorney, Agent or Firm:
Nakao Mitsuru