Title:
【発明の名称】基板搬送装置
Document Type and Number:
Japanese Patent JP2862956
Kind Code:
B2
Inventors:
OOTANI MASAMI
FUKUTOMI YOSHIMITSU
OKAMOTO TAKEO
OKA YOSHIJI
FUKUTOMI YOSHIMITSU
OKAMOTO TAKEO
OKA YOSHIJI
Application Number:
JP13749090A
Publication Date:
March 03, 1999
Filing Date:
May 28, 1990
Export Citation:
Assignee:
DAINIPPON SUKURIIN SEIZO KK
International Classes:
B65G1/04; B65G1/00; B65G49/07; B65G60/00; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JP2211650A | ||||
| JP3211749A | ||||
| JP3290946A |
Other References:
【文献】特許2552017(JP,B2)
Attorney, Agent or Firm:
Tsutomu Sugitani