Title:
【発明の名称】ホトレジスト層パターン測定方法
Document Type and Number:
Japanese Patent JP2867384
Kind Code:
B2
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Inventors:
ITANI TOSHIRO
Application Number:
JP15609988A
Publication Date:
March 08, 1999
Filing Date:
June 23, 1988
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G01N27/00; G01N21/88; G01N21/93; G01N21/956; G03F1/84; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): H01L21/66; G01N27/00; G03F1/08; H01L21/027
Domestic Patent References:
| JP60217642A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)