Title:
【発明の名称】拡散ウエーハの製造方法及びその拡散ウエーハ
Document Type and Number:
Japanese Patent JP2915893
Kind Code:
B1
Inventors:
Mizushima Tadashi
Watanabe Joyasu
Shozaburo Goto
Ichimura Katsumi
Watanabe Joyasu
Shozaburo Goto
Ichimura Katsumi
Application Number:
JP9849598A
Publication Date:
July 05, 1999
Filing Date:
March 26, 1998
Export Citation:
Assignee:
Naoetsu Electronics Industry Co., Ltd.
Shin-Etsu Semiconductor Co., Ltd.
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/223; H01L21/02; (IPC1-7): H01L21/02; H01L21/223
Attorney, Agent or Firm:
Masahisa Takahashi (1 person outside)