Title:
【発明の名称】フォトマスク及びその製造方法、フォトマスクブランクス
Document Type and Number:
Japanese Patent JP2924804
Kind Code:
B2
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Inventors:
TANABE YASUYOSHI
Application Number:
JP20367196A
Publication Date:
July 26, 1999
Filing Date:
August 01, 1996
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G03F1/32; G03F1/68; H01L21/027; (IPC1-7): G03F1/08; H01L21/027
Attorney, Agent or Firm:
Sugano Naka