Title:
【発明の名称】単結晶製造装置
Document Type and Number:
Japanese Patent JP2949806
Kind Code:
B2
Inventors:
KONO JUN
TATSUMI MASAMI
SAWADA SHINICHI
TATSUMI MASAMI
SAWADA SHINICHI
Application Number:
JP21336990A
Publication Date:
September 20, 1999
Filing Date:
August 09, 1990
Export Citation:
Assignee:
SUMITOMO DENKI KOGYO KK
International Classes:
C30B15/00; C30B27/02; H01L21/208; (IPC1-7): C30B15/00
Domestic Patent References:
| JP3257092A | ||||
| JP3285887A |
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)