Title:
【発明の名称】炭素膜形成方法
Document Type and Number:
Japanese Patent JP2975971
Kind Code:
B2
Inventors:
MYANAGA SHOJI
SUMINO SHINYA
SUMINO SHINYA
Application Number:
JP8777991A
Publication Date:
November 10, 1999
Filing Date:
March 27, 1991
Export Citation:
Assignee:
HANDOTAI ENERUGII KENKYUSHO KK
International Classes:
C30B29/04; C01B31/02; (IPC1-7): C30B29/04; C01B31/02
Domestic Patent References:
| JP4300290A | ||||
| JP62103367A | ||||
| JP63185894A | ||||
| JP4214094A | ||||
| JP63236791A |