Title:
【発明の名称】試料面位置測定装置
Document Type and Number:
Japanese Patent JP2980396
Kind Code:
B2
Inventors:
TOJO TOORU
TABATA MITSUO
TABATA MITSUO
Application Number:
JP8231891A
Publication Date:
November 22, 1999
Filing Date:
April 15, 1991
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G01B11/00; (IPC1-7): G01B11/00
Domestic Patent References:
| JP6338102A | ||||
| JP339605A |
Attorney, Agent or Firm:
Togawa Hideaki