Title:
【発明の名称】洗浄装置及びその洗浄方法
Document Type and Number:
Japanese Patent JP2981048
Kind Code:
B2
Inventors:
OOSAKO TAKASHI
MORI TADASHI
TANAKA YOSHIO
MORI TADASHI
TANAKA YOSHIO
Application Number:
JP3327892A
Publication Date:
November 22, 1999
Filing Date:
February 20, 1992
Export Citation:
Assignee:
OKI DENKI KOGYO KK
International Classes:
H01L21/304; (IPC1-7): H01L21/304; H01L21/304
Domestic Patent References:
| JP3286517A | ||||
| JP5144787A |
Attorney, Agent or Firm:
Mamoru Shimizu (3 outside)