【発明の名称】パターン膜修正装置

Title:

【発明の名称】パターン膜修正装置

Document Type and Number:

Japanese Patent JP2981983

Kind Code:

B2

Inventors:

NAKAGAWA YOSHITOMO
YAMAOKA TAKEHIRO

Application Number:

JP23231496A

Publication Date:

November 22, 1999

Filing Date:

September 02, 1996

Export Citation:

Assignee:

SEIKOO INSUTSURUMENTSU KK

International Classes:

B23K15/00; B23K15/02; G03F1/00; H01L21/027; H01L21/302; H01L21/3065; (IPC1-7): G03F1/00; B23K15/00; B23K15/02; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Keinosuke Hayashi

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