Title:
【発明の名称】レジスト現像装置及び現像方法
Document Type and Number:
Japanese Patent JP2982853
Kind Code:
B2
Inventors:
TANAKA TOSHIHIKO
MORIGAMI MITSUAKI
OIIZUMI HIROAKI
MORIGAMI MITSUAKI
OIIZUMI HIROAKI
Application Number:
JP3440794A
Publication Date:
November 29, 1999
Filing Date:
March 04, 1994
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
SORUTETSUKU KK
SORUTETSUKU KK
International Classes:
G03F7/30; H01L21/027; (IPC1-7): H01L21/027; G03F7/30
Domestic Patent References:
| JP6224115A | ||||
| JP6196397A | ||||
| JP6275514A | ||||
| JP5315241A |
Other References:
電子情報通信学会技術研究報告ＶＯＬ．８４，ＮＯ．２８２（ＳＤＭ９４ １０３−１１０）ＰＡＧＥ．３７−４４ １９９４
Attorney, Agent or Firm:
Akio Takahashi