Title:
【考案の名称】電気特性検査用プローブ
Document Type and Number:
Japanese Patent JP3005496
Kind Code:
U
Inventors:
Yoshiyuki Kokubun
Application Number:
JP732894U
Publication Date:
December 20, 1994
Filing Date:
June 22, 1994
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
(IPC1-7): G01R1/067; G01R31/02
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)