Title:
【発明の名称】単結晶の成長方法
Document Type and Number:
Japanese Patent JP3011085
Kind Code:
B2
Inventors:
Hideki Fujiwara
Application Number:
JP1319196A
Publication Date:
February 21, 2000
Filing Date:
January 29, 1996
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
International Classes:
C30B15/20; C30B29/06; H01L21/208; (IPC1-7): C30B15/20; C30B29/06
Domestic Patent References:
| JP9175895A | ||||
| JP5252185A | ||||
| JP6234591A | ||||
| JP431386A |
Attorney, Agent or Firm:
Norio Kawano