Title:
【発明の名称】膨潤性薄膜評価方法および膨潤性薄膜用マイクロバランスシステム
Document Type and Number:
Japanese Patent JP3015021
Kind Code:
B1
Inventors:
Toriumi Minoru
Application Number:
JP5896499A
Publication Date:
February 28, 2000
Filing Date:
March 05, 1999
Export Citation:
Assignee:
Semiconductor Leading Edge Technologies, Inc.
International Classes:
H01L21/66; G01N5/02; (IPC1-7): H01L21/66; G01N5/02
Domestic Patent References:
| JP4369459A | ||||
| JP3228346A | ||||
| JP1092789A | ||||
| JP743890A | ||||
| JP6276638A |
Attorney, Agent or Firm:
Mamoru Takada (2 outside)