Title:
【発明の名称】搬送方法及び搬送装置
Document Type and Number:
Japanese Patent JP3024005
Kind Code:
B2
Inventors:
Noriyuki Anai
Sonzo Sato
Hirofumi Shiraishi
Koji Harada
Takayuki Tomoe
Sonzo Sato
Hirofumi Shiraishi
Koji Harada
Takayuki Tomoe
Application Number:
JP12237091A
Publication Date:
March 21, 2000
Filing Date:
April 23, 1991
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B25J5/00; B65G43/08; B65G47/28; B65G47/52; B65H29/38; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G47/28
Attorney, Agent or Firm:
Toshio Inoue