Title:
【発明の名称】投影露光装置及び方法、並びに素子製造方法
Document Type and Number:
Japanese Patent JP3049777
Kind Code:
B2
Inventors:
Naomasa Shiraishi
Application Number:
JP40809690A
Publication Date:
June 05, 2000
Filing Date:
December 27, 1990
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B3/00; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03F7/20; G02B3/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP4101148A | ||||
| JP6191662A |