Title:
【発明の名称】高精度座標測定装置
Document Type and Number:
Japanese Patent JP3064613
Kind Code:
B2
Abstract:
PURPOSE:To make the moving part light and to obtain the conditions for excluding the errors in Abbe numbers in measurements of lengths and coordinates. CONSTITUTION:Optical interference is utilized in a length-measuring coordinate measuring apparatus. In this apparatus, a movable holder 2, which can be moved in the direction orthogonal to a reflecting mirror Mx fixed to a base stage 1, is provided. In this holder 2, a position detector 3 and first and second interferometers 20 and 30, which measure the relative moving amounts of the position detectors 3 and the reflecting mirror Mx, are provided. Each interferometer has a measuring optical system and a reference optical system. The optical axes of the measuring optical systems of the first and second interferometers are located at the distances of L and D from the measuring point O of the position detector 3. When the measured moving amount values are d1 and d2 and m=L/D, the moving amount S of the measuring point is computed by S=(d2-md1)/(1-m).
Inventors:
Hajime Morokuma
Application Number:
JP34478291A
Publication Date:
July 12, 2000
Filing Date:
December 26, 1991
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01B9/02; G01B11/00; (IPC1-7): G01B11/00
Domestic Patent References:
| JP5157516A | ||||
| JP6254114A | ||||
| JP6279305A |
Attorney, Agent or Firm:
Taiji Shinohara (1 person outside)