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Title:
【発明の名称】レーザ加工装置及びこれを用いた電子部品の製造方法
Document Type and Number:
Japanese Patent JP3096214
Kind Code:
B2
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Inventors:
Mutsushi Nakazawa
Hiroshi Takahashi
Application Number:
JP590595A
Publication Date:
October 10, 2000
Filing Date:
January 18, 1995
Export Citation:
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Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
B23K26/00; B23K26/064; (IPC1-7): B23K26/00; B23K26/08
Domestic Patent References:
JP61103690A
JP6285661A
JP5485498A
JP5994594A
Attorney, Agent or Firm:
Seiko Yoshida



 
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