Title:
【発明の名称】発光半導体素子用エピタキシャルウェーハ
Document Type and Number:
Japanese Patent JP3097587
Kind Code:
B2
Inventors:
Koichi Hasegawa
Kenichi Sakaue
Kenichi Sakaue
Application Number:
JP6629197A
Publication Date:
October 10, 2000
Filing Date:
March 19, 1997
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C30B29/06; C30B29/44; H01L33/16; H01L33/30; (IPC1-7): H01L33/00; C30B29/44
Domestic Patent References:
| JP7326792A | ||||
| JP6342935A | ||||
| JP537018A | ||||
| JP63151086A | ||||
| JP599984A | ||||
| JP4162015A | ||||
| JP9293896A | ||||
| JP5457498A | ||||
| JP5853827A |
Attorney, Agent or Firm:
Taira Yaguchi