Title:
【発明の名称】高純度クロルシランの製造方法
Document Type and Number:
Japanese Patent JP3132016
Kind Code:
B2
Inventors:
Yamato Miura
Toshiyuki Yanagisawa
Takaaki Shimizu
Toshiyuki Yanagisawa
Takaaki Shimizu
Application Number:
JP1385291A
Publication Date:
February 05, 2001
Filing Date:
January 11, 1991
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C01B33/107; C03B37/018; (IPC1-7): C01B33/107; C03B37/018
Attorney, Agent or Firm:
Takashi Kojima