Title:
【発明の名称】処理装置
Document Type and Number:
Japanese Patent JP3162702
Kind Code:
B2
Inventors:
Yuji Kamikawa
Yoshio Kumagai
Yoshio Kumagai
Application Number:
JP31247790A
Publication Date:
May 08, 2001
Filing Date:
November 17, 1990
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP2126113U | ||||
| JP6439633U |
Attorney, Agent or Firm:
Hajime Inoue (1 person outside)