Title:
【発明の名称】洗浄装置
Document Type and Number:
Japanese Patent JP3317855
Kind Code:
B2
Inventors:
Akira Yonemizu
Hiroyuki Kudo
Masami Nakumoto
Hiroyuki Kudo
Masami Nakumoto
Application Number:
JP23190096A
Publication Date:
August 26, 2002
Filing Date:
September 02, 1996
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B08B3/02; H01L21/304; (IPC1-7): H01L21/304; B08B3/02
Domestic Patent References:
| JP878378A | ||||
| JP6277638A | ||||
| JP8108125A | ||||
| JP8168614A | ||||
| JP521415A | ||||
| JP1012523A | ||||
| JP1041269A | ||||
| JP938595A | ||||
| JP1041264A | ||||
| JP1064869A | ||||
| JP7245466A | ||||
| JP4287922A | ||||
| JP63111960U | ||||
| JP1110887U |
Attorney, Agent or Firm:
Saichi Suyama