Title:
【発明の名称】微細貫通孔を有するセラミック部材
Document Type and Number:
Japanese Patent JP3320947
Kind Code:
B2
Abstract:
A ceramic member having fine throughholes (1) is a unitarily sintered body. The ceramic member has a ceramic substrate (9) having at least one window (3) and a thin ceramic plate (7) laminated onto the substrate so as to cover the window, wherein the thin ceramic plate has a plurality of fine throughholes (1) at the portion(s) corresponding to the at least one window and each hole-to-hole distance is 70 mu m or less. This ceramic member having fine throughholes is made of a material of heat resistance, abrasion resistance and low thermal expansion and satisfies the requirements of high density, high precision and increased reliability to be possessed by such devices as an encoder, a high-precision fine electric field shutter, an ion current-controlling head, a scale and the like.
Inventors:
Tsutomu Nanataki
Naruki Nakao
Naruki Nakao
Application Number:
JP12813395A
Publication Date:
September 03, 2002
Filing Date:
May 26, 1995
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
C04B35/00; B32B18/00; B41J2/415; C04B35/486; (IPC1-7): C04B35/00; B41J2/415
Domestic Patent References:
| JP6278310A | ||||
| JP4164661A |
Attorney, Agent or Firm:
Ippei Watanabe