Title:
【発明の名称】位相型回折素子およびそのグレーティングパターン製造方法
Document Type and Number:
Japanese Patent JP3326333
Kind Code:
B2
Inventors:
Takayuki Iizuka
Masato Noguchi
Tsutomu Sato
Masato Noguchi
Tsutomu Sato
Application Number:
JP19827296A
Publication Date:
September 24, 2002
Filing Date:
July 09, 1996
Export Citation:
Assignee:
Asahi Optical Co., Ltd.
International Classes:
G02B5/18; (IPC1-7): G02B5/18
Domestic Patent References:
| JP7225305A | ||||
| JP5749824A |
Attorney, Agent or Firm:
Shuhei Matsuoka