Title:
【発明の名称】光学特性調整方法及びデバイス製造方法
Document Type and Number:
Japanese Patent JP3347692
Kind Code:
B2
Inventors:
Yuhei Sumiyoshi
Application Number:
JP28124499A
Publication Date:
November 20, 2002
Filing Date:
October 01, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP6181162A | ||||
| JP62229838A | ||||
| JP10142501A |
Attorney, Agent or Firm:
Yukio Takanashi