Title:
【発明の名称】処理装置及びその方法
Document Type and Number:
Japanese Patent JP3352636
Kind Code:
B2
Inventors:
Yoshio Kimura
Kazunari Ueda
Kazunari Ueda
Application Number:
JP28606298A
Publication Date:
December 03, 2002
Filing Date:
September 22, 1998
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; H01L21/027; H01L21/673; H01L21/68; (IPC1-7): H01L21/027; H01L21/68
Domestic Patent References:
| JP6255707A | ||||
| JP221630A | ||||
| JP710212A |
Attorney, Agent or Firm:
Toshio Inoue (1 outside)