Title:
【発明の名称】薄膜トランジスタおよび液晶表示装置の製造方法
Document Type and Number:
Japanese Patent JP3357687
Kind Code:
B2
Inventors:
Masato Tsurugi
Application Number:
JP18790792A
Publication Date:
December 16, 2002
Filing Date:
July 15, 1992
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G02F1/136; G02F1/1368; H01L21/336; H01L29/78; H01L29/786; (IPC1-7): G02F1/1368; H01L29/786
Domestic Patent References:
| JP3125123A | ||||
| JP3148636A | ||||
| JP350527A | ||||
| JP2224255A | ||||
| JP57109322A |
Attorney, Agent or Firm:
Saichi Suyama