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Title:
【発明の名称】耐光性に優れた低反射回路転写装置用防塵枠部材およびその製造方法
Document Type and Number:
Japanese Patent JP3361429
Kind Code:
B2
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Inventors:
Yoshikazu Suzuki
Mamoru Matsuo
Yokocho Masaaki
Application Number:
JP6941596A
Publication Date:
January 07, 2003
Filing Date:
February 29, 1996
Export Citation:
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Assignee:
Sky Aluminum Co., Ltd.
International Classes:
G03F1/64; H01L21/027; (IPC1-7): G03F1/14; H01L21/027
Domestic Patent References:
JP1275733A
JP7248615A



 
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