Title:
【発明の名称】計測装置および計測方法
Document Type and Number:
Japanese Patent JP3376237
Kind Code:
B2
Inventors:
Matsuda Hisashi
Takashi Watanabe
Fumio Otomo
Kazutaka Ikeda
Takeo Suga
Yuji Nakata
Takashi Watanabe
Fumio Otomo
Kazutaka Ikeda
Takeo Suga
Yuji Nakata
Application Number:
JP5487997A
Publication Date:
February 10, 2003
Filing Date:
March 10, 1997
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01D7/00; G01D21/00; G01K7/00; G01K11/12; (IPC1-7): G01D7/00; G01D21/00; G01K7/00; G01K11/12
Domestic Patent References:
| JP5128380A | ||||
| JP5164616A |
Attorney, Agent or Firm:
Kazuo Sato (3 others)