Title:
【発明の名称】電子プローブマイクロアナライザー
Document Type and Number:
Japanese Patent JP3379637
Kind Code:
B2
Abstract:
In electron probe microanalyzer carrying out elementary analysis on a sample surface on the basis of a characteristic X-ray emitted from a sample by electron beam radiation, a computing function forming an isoline of a Z-axis coordinate value from a measured coordinate value within an analysis range and finding the range of the Z-axis correction value divided by the isoline is provided, and Z-axis directional position control of the sample is carried out according to the Z-axis correction value so that the sample surface satisfies an analysis condition height. A computing function finding a height correction value on a straight line passing the central position of a height distribution of the sample and using the height correction value for finding a three-dimensional correction value using a center position of the height distribution as a rotation center is provided, and Z-axis directional position control of the sample is carried out on the basis of the Z-axial correction value obtained from the three-dimensional correction value so that the sample surface satisfies the analysis condition height.
Inventors:
Hiroshi Sakamae
Application Number:
JP31919598A
Publication Date:
February 24, 2003
Filing Date:
November 10, 1998
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H01J37/20; G01N23/00; G01N23/225; H01J37/252; (IPC1-7): H01J37/252; G01N23/225; H01J37/20
Domestic Patent References:
| JP996615A | ||||
| JP60143750A | ||||
| JP6134936A |
Attorney, Agent or Firm:
Akio Shionoiri