Title:
【発明の名称】露光装置のピント合わせ方法
Document Type and Number:
Japanese Patent JP3382085
Kind Code:
B2
Inventors:
Masahiro Shinohara
Application Number:
JP10376796A
Publication Date:
March 04, 2003
Filing Date:
March 30, 1996
Export Citation:
Assignee:
Kyocera Mita Corporation
International Classes:
G03G15/041; G03B27/34; (IPC1-7): G03B27/34; G03G15/041
Domestic Patent References:
| JP62201741U | ||||
| JP62143916U |
Attorney, Agent or Firm:
Hideo Fujimoto