Title:
圧電振動子ユニット、及びこれの製造方法、及びインクジェット式記録ヘッド
Document Type and Number:
Japanese Patent JP3546430
Kind Code:
B2
Abstract:
One side face of a piezoelectric vibrator 2 is fixed to a fixing substrate 11. A first conductive layer 8 which conducts to a common internal electrode 3 exposed on the side face in the side of the fixing substrate 11 is formed on the front face of the piezoelectric vibrator 2 which is an unfixed face. A second conductive layer 10 which conducts to an individual internal electrode 4 is formed on the front face. A flexible cable 12 is connected to the front face.
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Inventors:
Tsuyoshi Kitahara
Minoru Usui
Satoshi Hosono
Minoru Usui
Satoshi Hosono
Application Number:
JP50507799A
Publication Date:
July 28, 2004
Filing Date:
June 26, 1998
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/14; B41J2/16; (IPC1-7): B41J2/045; B41J2/055; B41J2/16
Domestic Patent References:
JP10044439A | ||||
JP8192514A | ||||
JP4141432A | ||||
JP4099638A | ||||
JP4049046A | ||||
JP6226971A |
Attorney, Agent or Firm:
Katsuhiko Kimura
Keiji Nishikawa
Keiji Nishikawa