Title:
マスフローコントローラ
Document Type and Number:
Japanese Patent JP3562692
Kind Code:
B2
Inventors:
Taiichi Tokuhisa
Makoto Tanaka
Makoto Tanaka
Application Number:
JP21605897A
Publication Date:
September 08, 2004
Filing Date:
August 11, 1997
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
F16K7/12; F16K7/16; F16K31/02; G05D7/06; (IPC1-7): G05D7/06; F16K7/12; F16K7/16; F16K31/02
Domestic Patent References:
| JP2138582A | ||||
| JP8152072A | ||||
| JP5099349A |