Title:
陽極化成装置および陽極化成方法
Document Type and Number:
Japanese Patent JP3745282
Kind Code:
B2
Abstract:
To provide an anodization apparatus and a method for anodizing, capable of avoiding reduction of light transmittance of an optical filter.
The anodization apparatus 1 according to the current invention provides for a liquid tank 3 formed of a stage 5 and a casing 6 placing a glass plate G, and a lamp unit 4 including a halogen lamp 36 which emits to the glass plate G. The lamp unit 4 is provided with an optical filter 43, consisting of a filter layer 45 and a glass plate 44, and a fluorocarbon resin shielded 46 is pasted to a surface opposed to a liquid surface of anode chemical conversion liquid of the glass plate 44.
COPYRIGHT: (C)2003,JPO
Inventors:
Yagi Yasushi
Aoki
Mitsuru Ushijima
Aoki
Mitsuru Ushijima
Application Number:
JP2002016048A
Publication Date:
February 15, 2006
Filing Date:
January 24, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/306; H01J9/02; H01L21/3063
Domestic Patent References:
| JP61036927A | ||||
| JP7221066A | ||||
| JP9022891A | ||||
| JP10256225A | ||||
| JP10256227A |
Attorney, Agent or Firm:
Saichi Suyama