Title:
高解像度投影装置
Document Type and Number:
Japanese Patent JP3974304
Kind Code:
B2
Abstract:
A method of high resolution imaging for integrated circuits employs two masks and a laser source to impart an image onto a thermoresist coated image receiving surface. A primary mask carries a principal image to be recorded and a secondary mask contains an array of lenslets. The lenslet array concentrates light from a pulsed laser source onto a plurality of exposure points on the primary mask and the image features contained within that plurality of exposure points are imagewise reproduced in a corresponding plurality of exposure points on the image receiving surface. The lenslets in the lenslet array are dimensioned and positioned such that the plurality of exposure points formed on the image receiving surface have sufficient separation to avoid interaction. Relative motion ("scanning") between the primary and secondary mask creates raster lines on the primary mask to be exposed onto corresponding raster lines on the image receiving surface. Scanning continues until the entire image is transferred to the image receiving surface.
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Inventors:
Daniel Gerbert
Application Number:
JP2000000791A
Publication Date:
September 12, 2007
Filing Date:
January 06, 2000
Export Citation:
Assignee:
Cleo SRL
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP10199797A | ||||
| JP6333800A | ||||
| JP5326365A | ||||
| JP9171246A | ||||
| JP10261563A | ||||
| JP4140186A | ||||
| JP6310399A | ||||
| JP6045220A |
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida