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Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP3974772
Kind Code:
B2
Abstract:
A vacuum pump has a pump case (1) forming a gas suction port (2) at the upper surface thereof; a rotor shaft (5) rotatably supported in the pump case; a rotor (8) being formed a corrosion-resistant film treated by nonelectrolytic plating on the inner and outer circumferential surfaces (8b, 8a) of the rotor; a plurality of rotor blades (10) accommodated in the pump case and integrally formed with an outer circumferential surface of the rotor; a plurality of stator blades (11) fixed in the pump case such that the rotor blades and the stator blades are alternately positioned and arranged; a drive motor (9) for rotating the rotor shaft; and mass-addition means (15) formed by applying an adhesive or a coating, having heat and corrosion resistances, on the inner circumferential surface of the rotor.

Inventors:
Takamine justice
Yasushi Maejima
Shinji Kawanishi
Yuyuki Sakaguchi
Satoshi Okudera
Kenji Kabata
Yutaka Inayoshi
Application Number:
JP2001352256A
Publication Date:
September 12, 2007
Filing Date:
November 16, 2001
Export Citation:
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Assignee:
boc edwards corporation
International Classes:
F04D19/04; F04D29/00; F04D29/02; F04D29/66
Domestic Patent References:
JP1095595U
JP5321879A
JP58073325U
JP5015121A
Attorney, Agent or Firm:
Shigenori Wada