Title:
クリーニング機能付き搬送部材、及びこれに用いるクリーニング用ラベルシ―ト
Document Type and Number:
Japanese Patent JP3981243
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a conveying member having a cleaning function of a substrate treating apparatus which detests a foreign matter such as, an apparatus for manufacturing or an apparatus for inspecting, for example, a semiconductor, a flat panel display, a printed board or the like and a label sheet for cleaning used therefor. SOLUTION: The conveying member W with the cleaning function comprises a cleaning sheet A provided on the member W, and the shape of the cleaning sheet A is smaller than the shape of the member W and does not have bulges occurring from the end of the member.
Inventors:
Ryo Namikawa
Yoshio Terada
Yoshio Terada
Application Number:
JP2001109405A
Publication Date:
September 26, 2007
Filing Date:
April 09, 2001
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
B08B1/00; C09J4/02; H01L21/304; H01L21/677; H01L21/68
Domestic Patent References:
| JP2000312862A |
Attorney, Agent or Firm:
祢▲ぎ▼元 邦夫