Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP3986032
Kind Code:
B2
Inventors:
Izumi Yamato
Anazawa
Anazawa
Application Number:
JP24573898A
Publication Date:
October 03, 2007
Filing Date:
August 31, 1998
Export Citation:
Assignee:
Holon Co., Ltd.
International Classes:
H01J37/22; H01J37/244; H01J37/28
Domestic Patent References:
JP5258703A | ||||
JP57036763A | ||||
JP9259807A | ||||
JP8068772A | ||||
JP10214586A |
Attorney, Agent or Firm:
Morihiro Okada