Title:
感光性樹脂組成物およびその用途
Document Type and Number:
Japanese Patent JP3992847
Kind Code:
B2
Inventors:
Hiroaki Sato
Application Number:
JP18814898A
Publication Date:
October 17, 2007
Filing Date:
June 17, 1998
Export Citation:
Assignee:
Nippon Synthetic Chemical Industry Co., Ltd.
International Classes:
G03F7/004; G03F7/031; G03F7/027; G03F7/033; H01J9/02; H01J11/22; H01J17/49
Domestic Patent References:
| JP3116148A | ||||
| JP8211596A | ||||
| JP4225009A |